Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662323 | Method and system for inspecting an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2023-05-30 |
| 10775325 | Method and system for inspecting an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2020-09-15 |
| 10088438 | Method and system for inspecting an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2018-10-02 |
| 9859089 | Method and system for inspecting and grounding an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2018-01-02 |
| 9485846 | Method and system for inspecting an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2016-11-01 |