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System for inspecting and grounding a mask in a charged particle system |
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Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chung-Shih Pan |
2023-05-30 |
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Charged particle beam inspection of ungrounded samples |
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2022-09-20 |
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Micro LED display panel |
Tzu-Yi Kuo, Cheng Ta Kao, Yu-Kuang Tseng |
2022-06-21 |
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Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chung-Shih Pan |
2020-09-15 |
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Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chung-Shih Pan |
2018-10-02 |
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Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chung-Shih Pan |
2018-08-21 |
| 9859089 |
Method and system for inspecting and grounding an EUV mask |
Guochong Weng, Youjin Wang, Chung-Shih Pan |
2018-01-02 |
| 9572237 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chung-Shih Pan |
2017-02-14 |
| 9485846 |
Method and system for inspecting an EUV mask |
Guochong Weng, Youjin Wang, Chung-Shih Pan |
2016-11-01 |
| 9436985 |
Method and system for enhancing image quality |
Joe Wang, Van-Duc Nguyen |
2016-09-06 |
| 9177758 |
Charged particle beam apparatus |
Zhongwei Chen, Jack Jau, Weiming Ren, Yixiang Wang, Xiaoli Guo +1 more |
2015-11-03 |
| 9164399 |
Reticle operation system |
Youjin Wang, Chung-Shih Pan |
2015-10-20 |
| 9113538 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chung-Shih Pan |
2015-08-18 |
| 9002097 |
Method and system for enhancing image quality |
Joe Wang, Van-Duc Nguyen |
2015-04-07 |
| 8692193 |
Method for inspecting EUV reticle and apparatus thereof |
Wei Fang, You-Jin Wang |
2014-04-08 |
| 8575573 |
Structure for discharging extreme ultraviolet mask |
You-Jin Wang, Chung-Shih Pan |
2013-11-05 |
| 8519333 |
Charged particle system for reticle/wafer defects inspection and review |
Yi Wang, Chung-Shih Pan, Zhonghua Dong, Zhongwei Chen |
2013-08-27 |
| 8295580 |
Substrate and die defect inspection method |
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2012-10-23 |
| 8217349 |
Method for inspecting EUV reticle and apparatus thereof |
Wei Fang, You-Jin Wang |
2012-07-10 |
| 7115866 |
Site stepping for electron beam micro analysis |
Roger Kroeze, David Aitan Soltz, David A. Crewe, Gregory W. Grant, Thierry H. C. Nguyen +2 more |
2006-10-03 |