Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392732 | Multi-source illumination unit and method of operating the same | Jian Zhang, Zhiwen KANG | 2025-08-19 |
| 12368067 | Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer | Shibing Liu, Ying Luo | 2025-07-22 |
| 12217927 | Beam manipulation of advanced charge controller module in a charged particle system | Jian Zhang, Ning Ye, Zhiwen KANG | 2025-02-04 |
| 12142456 | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system | Jinmei Yang, Jian Zhang, Zhiwen KANG | 2024-11-12 |
| 12142451 | System for inspecting and grounding a mask in a charged particle system | Tianming Chen, Chiyan Kuan, Zhi Wang | 2024-11-12 |
| 12125669 | Thermal-aided inspection by advanced charge controller module in a charged particle system | Ning Ye, Jun Jiang, Jian Zhang | 2024-10-22 |
| D1044531 | Safety laser radar | Hongxiang Zheng, Mingjuan Ding, Xingqiang Wang, Zhenwei WANG, Yubao Sun +7 more | 2024-10-01 |
| 12087542 | Image contrast enhancement in sample inspection | Frank Zhang | 2024-09-10 |
| 12072181 | Inspection apparatus and method | Yan Wang, Jian Zhang, Zhiwen KANG | 2024-08-27 |
| 12051562 | Method, apparatus, and system for wafer grounding | Shibing Liu, Shanhui Cao, Kangsheng Qiu, Juying Dou, Ying Luo +4 more | 2024-07-30 |
| 12028000 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2024-07-02 |
| 11929232 | Systems and methods for charged particle flooding to enhance voltage contrast defect signal | Frank Zhang, Zhongwei Chen, Ying Shen | 2024-03-12 |
| 11815473 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Feng TSENG, Zhonghua Dong, Zhong-Wei Chen | 2023-11-14 |
| 11808930 | Optical objective lens | Jian Zhang, Zhiwen KANG | 2023-11-07 |
| 11728131 | Thermal-aided inspection by advanced charge controller module in a charged particle system | Ning Ye, Jun Jiang, Jian Zhang | 2023-08-15 |
| 11682538 | Optical system with compensation lens | Jian Zhang, Zhiwen KANG | 2023-06-20 |
| 11637512 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2023-04-25 |
| 11581161 | Systems and methods for etching a substrate | Jie Fang, Qirong Zhang, Haojie Zhang, Jinmei Yang, Fenghui ZHU | 2023-02-14 |
| 11562884 | Current source apparatus and method | Yanqiu Wang, Xiaodong He, Guofan Ye | 2023-01-24 |
| 11521826 | Optical height detection system | Jian Zhang, Zhiwen KANG | 2022-12-06 |
| 11482399 | Method and apparatus for an advanced charged controller for wafer inspection | Jian Zhang, Qing Chen | 2022-10-25 |
| 11183360 | Optical system with compensation lens | Jian Zhang, Zhiwen KANG | 2021-11-23 |
| 11164719 | Image contrast enhancement in sample inspection | Frank Zhang | 2021-11-02 |
| 11006869 | Trans-abdominal non-invasive fetal blood oxygen saturation detection device | Wen-Chie Huang | 2021-05-18 |
| 10994997 | Device and method for industrialized continuous production of black phosphorus | Ming-Yu Lin, Hejun WANG, Xinyue Lin, Xinyang Lin, Yifei Wang +3 more | 2021-05-04 |