Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368067 | Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer | Yixiang Wang, Ying Luo | 2025-07-22 |
| 12051562 | Method, apparatus, and system for wafer grounding | Yixiang Wang, Shanhui Cao, Kangsheng Qiu, Juying Dou, Ying Luo +4 more | 2024-07-30 |
| 12028000 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2024-07-02 |
| 11637512 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2023-04-25 |