| 12424408 |
Apparatus of plural charged-particle beams |
Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen |
2025-09-23 |
|
| 12051562 |
Method, apparatus, and system for wafer grounding |
Yixiang Wang, Shibing Liu, Shanhui Cao, Kangsheng Qiu, Ying Luo +4 more |
2024-07-30 |
$121,959,000 |
| 11705304 |
Apparatus of plural charged-particle beams |
Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen |
2023-07-18 |
$64,329,000 |
| 11688579 |
Electron emitter and method of fabricating same |
Zheng Fan, Tzu-Yi Kuo, Zhong-Wei Chen |
2023-06-27 |
$66,537,000 |
| 11201032 |
Electron emitter and method of fabricating same |
Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen |
2021-12-14 |
$146,392,000 |
| 11062877 |
Apparatus of plural charged-particle beams |
Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen |
2021-07-13 |
$103,474,000 |
| 10784071 |
Electron emitter and method of fabricating same |
Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen |
2020-09-22 |
$34,133,000 |
| 10541110 |
Apparatus of plural charged-particle beams |
Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen |
2020-01-21 |
$25,931,000 |
| 9991147 |
Wafer grounding and biasing method, apparatus, and application |
Yi Wang, Kenichi Kanai |
2018-06-05 |
|
| 9922799 |
Apparatus of plural charged-particle beams |
Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen |
2018-03-20 |
|
| 8908348 |
Wafer grounding and biasing method, apparatus, and application |
Yi Wang, Kenichi Kanai |
2014-12-09 |
|
| 8896195 |
Filament for electron source |
— |
2014-11-25 |
|
| 8218284 |
Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam |
Zhong-Wei Chen, Yi Wang |
2012-07-10 |
|
| 8094428 |
Wafer grounding methodology |
Yi Wang, Kenichi Kanai, Jun Jiang, Zheng Fan, Qingyu Meng +1 more |
2012-01-10 |
|
| 8022609 |
Thermal field emission cathode |
Zhong-Wei Chen |
2011-09-20 |
|
| 7960697 |
Electron beam apparatus |
Zhongwei Chen, Weiming Ren, Joe Wang, Xuedong Liu, Fumin He +5 more |
2011-06-14 |
|
| 7759653 |
Electron beam apparatus |
Zhong-Wei Chen, Xuedong Liu, Xu Zhang, Weiming Ren |
2010-07-20 |
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