Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424408 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2025-09-23 |
| 12051562 | Method, apparatus, and system for wafer grounding | Yixiang Wang, Shibing Liu, Shanhui Cao, Kangsheng Qiu, Ying Luo +4 more | 2024-07-30 |
| 11705304 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2023-07-18 |
| 11688579 | Electron emitter and method of fabricating same | Zheng Fan, Tzu-Yi Kuo, Zhong-Wei Chen | 2023-06-27 |
| 11201032 | Electron emitter and method of fabricating same | Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen | 2021-12-14 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2021-07-13 |
| 10784071 | Electron emitter and method of fabricating same | Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen | 2020-09-22 |
| 10541110 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2020-01-21 |
| 9991147 | Wafer grounding and biasing method, apparatus, and application | Yi Wang, Kenichi Kanai | 2018-06-05 |
| 9922799 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2018-03-20 |
| 8908348 | Wafer grounding and biasing method, apparatus, and application | Yi Wang, Kenichi Kanai | 2014-12-09 |
| 8896195 | Filament for electron source | — | 2014-11-25 |
| 8218284 | Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam | Zhong-Wei Chen, Yi Wang | 2012-07-10 |
| 8094428 | Wafer grounding methodology | Yi Wang, Kenichi Kanai, Jun Jiang, Zheng Fan, Qingyu Meng +1 more | 2012-01-10 |
| 8022609 | Thermal field emission cathode | Zhong-Wei Chen | 2011-09-20 |
| 7960697 | Electron beam apparatus | Zhongwei Chen, Weiming Ren, Joe Wang, Xuedong Liu, Fumin He +5 more | 2011-06-14 |
| 7759653 | Electron beam apparatus | Zhong-Wei Chen, Xuedong Liu, Xu Zhang, Weiming Ren | 2010-07-20 |