Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176967 | Load lock system for charged particle beam imaging | Hsuan-Bin Huang, Chun Lu, Chin-Fa Tu, Wen-Sheng Lin | 2019-01-08 |
| 10054556 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | Chiyan Kuan, Chung-Shih Pan | 2018-08-21 |
| 9572237 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | Chiyan Kuan, Chung-Shih Pan | 2017-02-14 |
| 9460887 | Discharging method for charged particle beam imaging | Chung-Shih Pan | 2016-10-04 |
| 9113538 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | Chiyan Kuan, Chung-Shih Pan | 2015-08-18 |
| 8692193 | Method for inspecting EUV reticle and apparatus thereof | Chiyan Kuan, Wei Fang | 2014-04-08 |
| 8604428 | Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system | Chung-Shih Pan | 2013-12-10 |
| 8575573 | Structure for discharging extreme ultraviolet mask | Chiyan Kuan, Chung-Shih Pan | 2013-11-05 |
| 8302420 | Method for venting gas into closed space and gas supply assembly thereof | — | 2012-11-06 |
| 8217349 | Method for inspecting EUV reticle and apparatus thereof | Chiyan Kuan, Wei Fang | 2012-07-10 |
| 8110818 | Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system | Chung-Shih Pan | 2012-02-07 |
| 8089637 | Apparatus for detecting a sample | Jianxin Wu | 2012-01-03 |
| 8031344 | Z-stage configuration and application thereof | Chung-Shih Pan | 2011-10-04 |
| 7868303 | Method and handling apparatus for placing patterning device on support member for charged particle beam imaging | Hsuan-Bin Huang, Chung-Shih Pan | 2011-01-11 |
| 7838848 | Patterning device holding apparatus and application thereof | Hsuan-Bin Huang, Chung-Shih Pan | 2010-11-23 |