| 10176967 |
Load lock system for charged particle beam imaging |
Hsuan-Bin Huang, Chun Lu, Chin-Fa Tu, Wen-Sheng Lin |
2019-01-08 |
| 10054556 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
Chiyan Kuan, Chung-Shih Pan |
2018-08-21 |
| 9572237 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
Chiyan Kuan, Chung-Shih Pan |
2017-02-14 |
| 9460887 |
Discharging method for charged particle beam imaging |
Chung-Shih Pan |
2016-10-04 |
| 9113538 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask |
Chiyan Kuan, Chung-Shih Pan |
2015-08-18 |
| 8692193 |
Method for inspecting EUV reticle and apparatus thereof |
Chiyan Kuan, Wei Fang |
2014-04-08 |
| 8604428 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system |
Chung-Shih Pan |
2013-12-10 |
| 8575573 |
Structure for discharging extreme ultraviolet mask |
Chiyan Kuan, Chung-Shih Pan |
2013-11-05 |
| 8302420 |
Method for venting gas into closed space and gas supply assembly thereof |
— |
2012-11-06 |
| 8217349 |
Method for inspecting EUV reticle and apparatus thereof |
Chiyan Kuan, Wei Fang |
2012-07-10 |
| 8110818 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system |
Chung-Shih Pan |
2012-02-07 |
| 8089637 |
Apparatus for detecting a sample |
Jianxin Wu |
2012-01-03 |
| 8031344 |
Z-stage configuration and application thereof |
Chung-Shih Pan |
2011-10-04 |
| 7868303 |
Method and handling apparatus for placing patterning device on support member for charged particle beam imaging |
Hsuan-Bin Huang, Chung-Shih Pan |
2011-01-11 |
| 7838848 |
Patterning device holding apparatus and application thereof |
Hsuan-Bin Huang, Chung-Shih Pan |
2010-11-23 |