Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643818 | Load lock system for charged particle beam imaging | Chun Lu, Chin-Fa Tu, Wen-Sheng Lin, Youjin Wang | 2020-05-05 |
| 10262552 | Ball movement state measuring system and method thereof | Ching-Lun Lin, Yu-Lin Wang, Yin-Lin Chen, Hsin-Hsi Li, Hong-Lin Chen +2 more | 2019-04-16 |
| 10176967 | Load lock system for charged particle beam imaging | Chun Lu, Chin-Fa Tu, Wen-Sheng Lin, You-Jin Wang | 2019-01-08 |
| 7868303 | Method and handling apparatus for placing patterning device on support member for charged particle beam imaging | You-Jin Wang, Chung-Shih Pan | 2011-01-11 |
| 7838848 | Patterning device holding apparatus and application thereof | You-Jin Wang, Chung-Shih Pan | 2010-11-23 |