| 11333487 |
Common path mode fiber tip diffraction interferometer for wavefront measurement |
Haifeng Huang, Rui-fang Shi, Robert Kestner |
2022-05-17 |
$132,895,000 |
| 9702693 |
Apparatus for measuring overlay errors |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2017-07-11 |
|
| 8502979 |
Methods and systems for determining a critical dimension and overlay of a specimen |
Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more |
2013-08-06 |
$16,973,000 |
| 8330281 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2012-12-11 |
$19,789,000 |
| 8179530 |
Methods and systems for determining a critical dimension and overlay of a specimen |
Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more |
2012-05-15 |
$20,701,000 |
| 7933016 |
Apparatus and methods for detecting overlay errors using scatterometry |
Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more |
2011-04-26 |
$13,337,000 |
| 7879627 |
Overlay marks and methods of manufacturing such marks |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2011-02-01 |
$20,148,000 |
| 7751046 |
Methods and systems for determining a critical dimension and overlay of a specimen |
Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more |
2010-07-06 |
$26,708,000 |
| 7663753 |
Apparatus and methods for detecting overlay errors using scatterometry |
Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more |
2010-02-16 |
$12,327,000 |
| 7463369 |
Systems and methods for measuring one or more characteristics of patterned features on a specimen |
Haiming Wang, Kenneth P. Gross |
2008-12-09 |
$10,943,000 |
| 7460981 |
Methods and systems for determining a presence of macro and micro defects on a specimen |
Gary Bultman, Ady Levy, Kyle Brown, Mehrdad Nikoonahad, John Fielden |
2008-12-02 |
$26,901,000 |
| 7349090 |
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography |
Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden |
2008-03-25 |
$20,655,000 |
| 7317531 |
Apparatus and methods for detecting overlay errors using scatterometry |
Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more |
2008-01-08 |
$13,879,000 |
| 7317824 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2008-01-08 |
$13,879,000 |
| 7301634 |
Apparatus and methods for detecting overlay errors using scatterometry |
Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +7 more |
2007-11-27 |
$9,283,000 |
| 7274814 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2007-09-25 |
$19,077,000 |
| 7196782 |
Methods and systems for determining a thin film characteristic and an electrical property of a specimen |
John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad |
2007-03-27 |
$36,715,000 |
| 7181057 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Michael Adel, Mark Ghinovker, Walter D. Mieher, Ady Levy |
2007-02-20 |
$18,240,000 |
| 7139083 |
Methods and systems for determining a composition and a thickness of a specimen |
John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad |
2006-11-21 |
$23,110,000 |
| 7130029 |
Methods and systems for determining an adhesion characteristic and a thickness of a specimen |
Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden |
2006-10-31 |
$15,704,000 |
| 7106425 |
Methods and systems for determining a presence of defects and a thin film characteristic of a specimen |
Gary Bultman, Ady Levy, Kyle Brown, Mehrdad Nikoonahad, John Fielden |
2006-09-12 |
$14,851,000 |
| 7068833 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy |
2006-06-27 |
$12,740,000 |
| 7006235 |
Methods and systems for determining overlay and flatness of a specimen |
Ady Levy, Kyle Brown, Mehrdad Nikoonahad, Gary Bultman, John Fielden |
2006-02-28 |
$16,066,000 |
| 6950196 |
Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen |
John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad |
2005-09-27 |
$28,686,000 |
| 6946394 |
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process |
John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad |
2005-09-20 |
$14,604,000 |
