| 11682570 |
Process-induced displacement characterization during semiconductor production |
Pradeep Vukkadala, Mark D. Smith, Ady Levy, Dieter Mueller |
2023-06-20 |
| 11441893 |
Multi-spot analysis system with multiple optical probes |
Dieter Mueller, Dong Chen, Dengpeng Chen, Steve Zamek, Daniel Kavaldjiev +1 more |
2022-09-13 |
| 11164768 |
Process-induced displacement characterization during semiconductor production |
Pradeep Vukkadala, Mark D. Smith, Ady Levy, Dieter Mueller |
2021-11-02 |
| 11049720 |
Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films |
Dieter Mueller, Xiaomeng Shen, Jason Saito |
2021-06-29 |
| 10545412 |
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control |
Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +1 more |
2020-01-28 |
| 9087176 |
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control |
Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +2 more |
2015-07-21 |
| 8269960 |
Computer-implemented methods for inspecting and/or classifying a wafer |
Juergen Reich, Louis Vintro, Andrew J. Steinbach, Daniel Kavaldjiev, Stephen Biellak |
2012-09-18 |