| 11456194 |
Determining critical parameters using a high-dimensional variable selection model |
Wei Chang, Joseph Gutierrez |
2022-09-27 |
| 10650508 |
Automatic defect classification without sampling and feature selection |
Wei Chang, Ramon Olavarria |
2020-05-12 |
| 10545412 |
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control |
Wei Chang, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton, Amir Azordegan +1 more |
2020-01-28 |
| 10361105 |
Determining critical parameters using a high-dimensional variable selection model |
Wei Chang, Joseph Gutierrez |
2019-07-23 |
| 9707660 |
Predictive wafer modeling based focus error prediction using correlations of wafers |
Pradeep Vukkadala, Jaydeep Sinha, Wei Chang |
2017-07-18 |
| 9087176 |
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control |
Wei Chang, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton, Amir Azordegan +2 more |
2015-07-21 |