Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545412 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Amir Azordegan +1 more | 2020-01-28 |
| 9588441 | Method and device for using substrate geometry to determine optimum substrate analysis sampling | Jaydeep Sinha | 2017-03-07 |
| 9518932 | Metrology optimized inspection | Allen Park, Ellis Chang | 2016-12-13 |
| 9513565 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Sathish Veeraraghavan, Pradeep Vukkadala, Jaydeep Sinha, Amir Azordegan | 2016-12-06 |
| 9373165 | Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance | Amir Azordegan, Pradeep Vukkadala, Jaydeep Sinha | 2016-06-21 |
| 9087176 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Amir Azordegan +2 more | 2015-07-21 |
| 9029810 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Sathish Veeraraghavan, Pradeep Vukkadala, Jaydeep Sinha, Amir Azordegan | 2015-05-12 |