Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197137 | System and method for determining post bonding overlay | Franz Zach, Mark D. Smith, Xiaomeng Shen, David Owen | 2025-01-14 |
| 11829077 | System and method for determining post bonding overlay | Franz Zach, Mark D. Smith, Xiaomeng Shen, David Owen | 2023-11-28 |
| 11049720 | Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films | Dieter Mueller, Prasanna Dighe, Xiaomeng Shen | 2021-06-29 |
| 7728969 | Methods and systems for identifying defect types on a wafer | Wei Shen | 2010-06-01 |