XS

Xiaomeng Shen

KL Kla: 3 patents #125 of 758Top 20%
Overall (All Time): #1,312,566 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12197137 System and method for determining post bonding overlay Franz Zach, Mark D. Smith, Jason Saito, David Owen 2025-01-14
11829077 System and method for determining post bonding overlay Franz Zach, Mark D. Smith, Jason Saito, David Owen 2023-11-28
11049720 Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films Dieter Mueller, Prasanna Dighe, Jason Saito 2021-06-29