Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11879853 | Continuous degenerate elliptical retarder for sensitive particle detection | Xuefeng Liu, Yung-Ho Alex Chuang, John Fielden | 2024-01-23 |
| 11733172 | Apparatus and method for rotating an optical objective | Anatoly Romanovsky, Daniel Kavaldjiev, Chunhai Wang, Bret Whiteside, Zhiwei Xu | 2023-08-22 |
| 11243175 | Sensitive particle detection with spatially-varying polarization rotator and polarizer | Xuefeng Liu, Daniel Kavaldjiev, John Fielden | 2022-02-08 |
| 10948423 | Sensitive particle detection with spatially-varying polarization rotator and polarizer | Xuefeng Liu, Daniel Kavaldjiev, John Fielden | 2021-03-16 |
| 10942135 | Radial polarizer for particle detection | Daniel Kavaldjiev, Guoheng Zhao | 2021-03-09 |
| 9291575 | Wafer inspection | Guoheng Zhao, Mehdi Vaez-Iravani | 2016-03-22 |
| 8891079 | Wafer inspection | Guoheng Zhao, Mehdi Vaez-Iravani | 2014-11-18 |
| 7525649 | Surface inspection system using laser line illumination with two dimensional imaging | Guoheng Zhao, Mehdi Vaez-Iravani | 2009-04-28 |
| 6724473 | Method and system using exposure control to inspect a surface | Guoheng Zhao, Mehdi Vaez-Iravani | 2004-04-20 |