Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379061 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan, Pradeep Vukkadala | 2019-08-13 |
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Jaydeep Sinha, Shouhong Tang | 2019-07-16 |
| 10330608 | Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools | Haiguang Chen, Jaydeep Sinha | 2019-06-25 |
| 9702829 | Systems and methods for wafer surface feature detection and quantification | Haiguang Chen, Jaydeep Sinha, Enrique Chavez, Shouhong Tang, Mark Plemmons | 2017-07-11 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan, Pradeep Vukkadala | 2017-01-17 |
| 9177370 | Systems and methods of advanced site-based nanotopography for wafer surface metrology | Haiguang Chen, Jaydeep Sinha, Pradeep Vukkadala | 2015-11-03 |
| 9031810 | Methods and systems of object based metrology for advanced wafer surface nanotopography | Haiguang Chen, Jaydeep Sinha | 2015-05-12 |
| 8630479 | Methods and systems for improved localized feature quantification in surface metrology tools | Haiguang Chen, Jaydeep Sinha, Shouhong Tang, John Hager, Andrew Zeng | 2014-01-14 |