Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017520 | Multi-wavelength interferometry for defect classification | Helen Liu | 2021-05-25 |
| 10705026 | Scanning differential interference contrast in an imaging system design | Xuan Wang, Steve Xu | 2020-07-07 |
| 10571248 | Transparent film error correction pattern in wafer geometry system | Helen Liu | 2020-02-25 |
| 10236222 | System and method for measuring substrate and film thickness distribution | Dengpeng Chen | 2019-03-19 |
| 9279663 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Chunsheng Huang, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang | 2016-03-08 |
| 9121684 | Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes | Shouhong Tang, Yi Zhang, Jie Zheng | 2015-09-01 |
| 8630479 | Methods and systems for improved localized feature quantification in surface metrology tools | Haiguang Chen, Jaydeep Sinha, Shouhong Tang, John Hager, Sergey Kamensky | 2014-01-14 |
| 7315365 | System and methods for classifying anomalies of sample surfaces | Wayne Chen, Mustafa Akbulut | 2008-01-01 |
| 7038772 | System and methods for classifying anomalies of sample surfaces | Wayne Chen, Mustafa Akbulut | 2006-05-02 |
| 7016031 | System and methods for classifying anomalies of sample surfaces | Wayne Chen, Mustafa Akbulut | 2006-03-21 |
| 6862096 | Defect detection system | Mehdi Vaez-Iravani, Jeffrey Rzepiela, Carl Treadwell, Robert W. Fiordalice | 2005-03-01 |
| 6590645 | System and methods for classifying anomalies of sample surfaces | Wayne Chen, Mustafa Akbulut | 2003-07-08 |
| 6538730 | Defect detection system | Mehdi Vaez-Iravani, Jeffrey Rzepiela, Carl Treadwell, Robert W. Fiordalice | 2003-03-25 |