Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8825444 | Automated system check for metrology unit | Pablo I. Rovira, Jonathan M. Madsen, Scott Penner | 2014-09-02 |
| 7173417 | Eddy current sensor with concentric confocal distance sensor | Claudio L. Rampoldi, Pablo I. Rovira, Christopher W. Blaufus | 2007-02-06 |
| 7061613 | Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation | Chunsheng Huang, Pablo I. Rovira | 2006-06-13 |
| 7005306 | Accurate thickness measurement of thin conductive film | — | 2006-02-28 |
| 6925860 | Leveling a measured height profile | Claudio L. Rampoldi | 2005-08-09 |
| 6853873 | Enhanced throughput of a metrology tool | Jason H. Rollo | 2005-02-08 |
| 6813031 | Method of determining material using intensity of light | Claudio L. Rampoldi | 2004-11-02 |
| 6772620 | Method of generating calibration data for relative height measurement | — | 2004-08-10 |
| 6762846 | Substrate surface profile and stress measurement | — | 2004-07-13 |
| 6710888 | Method of measuring dishing | — | 2004-03-23 |
| 6700670 | Method of measuring dishing using relative height measurements | — | 2004-03-02 |
| 6657216 | Dual spot confocal displacement sensor | — | 2003-12-02 |
| 6633389 | Profiling method | Claudio L. Rampoldi | 2003-10-14 |
| 6568290 | Method of measuring dishing using relative height measurement | — | 2003-05-27 |
| RE37749 | Electrodeposition apparatus with virtual anode | — | 2002-06-18 |
| 5723028 | Electrodeposition apparatus with virtual anode | — | 1998-03-03 |
| 5625170 | Precision weighing to monitor the thickness and uniformity of deposited or etched thin film | — | 1997-04-29 |
| 5368711 | Selective metal electrodeposition process and apparatus | — | 1994-11-29 |
| 5256274 | Selective metal electrodeposition process | — | 1993-10-26 |
| 4405416 | Molten salt lithium cells | Ian D. Raistrick, Robert A. Huggins | 1983-09-20 |
| 4315059 | Molten salt lithium cells | Ian D. Raistrick, Robert A. Huggins | 1982-02-09 |