Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7301623 | Transferring, buffering and measuring a substrate in a metrology system | Jonathan M. Madsen, Jiangtao Hu | 2007-11-27 |
| 7173417 | Eddy current sensor with concentric confocal distance sensor | Jaime Poris, Claudio L. Rampoldi, Pablo I. Rovira | 2007-02-06 |
| 7032287 | Edge grip chuck | Blaine R. Spady, Douglas A. Page, Dan M. Colban | 2006-04-25 |
| 6910847 | Precision polar coordinate stage | Blaine R. Spady, John D. Heaton, Dan M. Colban | 2005-06-28 |