Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7295314 | Metrology/inspection positioning system | John D. Heaton, Robert Buchanan, Richard A. Yarussi | 2007-11-13 |
| 7289215 | Image control in a metrology/inspection positioning system | John D. Heaton, Robert Buchanan, Richard A. Yarussi | 2007-10-30 |
| 7032287 | Edge grip chuck | Christopher W. Blaufus, Douglas A. Page, Dan M. Colban | 2006-04-25 |
| 6970255 | Encoder measurement based on layer thickness | John D. Heaton, Weidong Yang, Roger R. Lowe-Webb | 2005-11-29 |
| 6910847 | Precision polar coordinate stage | Christopher W. Blaufus, John D. Heaton, Dan M. Colban | 2005-06-28 |
| 6854948 | Stage with two substrate buffer station | Dan M. Colban, Robert S. Kearns | 2005-02-15 |
| 6836690 | High precision substrate prealigner | William A. McGahan, James V. Read, Arosha W. Goonesekera, Eric Alexander Rost | 2004-12-28 |
| 6779278 | Compact rotating stage | Dan M. Colban | 2004-08-24 |
| 6320609 | System using a polar coordinate stage and continuous image rotation to compensate for stage rotation | Robert Buchanan, Richard A. Yarussi | 2001-11-20 |
| 6181427 | Compact optical reflectometer system | Richard A. Yarussi | 2001-01-30 |