Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366307 | Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection | Hongxing Yuan, Bret Whiteside | 2022-06-21 |
| 10088345 | Haze and defect distribution and aperture configuration in surface metrology inspectors | Chuanyong Huang, Raymond Chu, Gordana Neskovic, Dieter Wilk, Christian Wolters | 2018-10-02 |