Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863020 | Segmented electrode apparatus for plasma processing | Wayne Johnson | 2005-03-08 |
| 6824363 | Linear inductive plasma pump for process reactors | Wayne Johnson | 2004-11-30 |
| 6812646 | Method and device for attenuating harmonics in semiconductor plasma processing systems | Thomas Windhorn, Wayne Johnson | 2004-11-02 |
| 6806653 | Method and structure to segment RF coupling to silicon electrode | Eric J. Strang | 2004-10-19 |
| 6729850 | Applied plasma duct system | Raphael A. Dandl, Bill Quon, Samuel Antley, Wayne Johnson | 2004-05-04 |
| 6713969 | Method and apparatus for determination and control of plasma state | Murray D. Sirkis, Wayne Johnson, Eric J. Strang | 2004-03-30 |
| 6700458 | Device and method for coupling two circuit components which have different impedances | Thomas Windhorn, Wayne L. Johson | 2004-03-02 |
| 6677604 | Optical system and method for plasma optical emission analysis | — | 2004-01-13 |