Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354890 | Stage and plasma processing apparatus | Katsuyuki Koizumi, Masanori Takahashi | 2025-07-08 |
| 12148636 | Substrate support | Masanori Takahashi | 2024-11-19 |
| 11791177 | Placing table including heat exchange medium path and substrate processing apparatus thereof | Katsuyuki Koizumi, Masanori Takahashi | 2023-10-17 |
| 11784066 | Stage and plasma processing apparatus | Katsuyuki Koizumi, Masanori Takahashi | 2023-10-10 |