Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Takashi Mochizuki, Daisuke Toriya, Hwajun Noh | 2022-07-26 |
| 9510249 | Wireless communication system, communication method, base station, and mobile terminal | Shinichi Sawada, Tadashi Shimonabe, Shigeto Suzuki, Mitsuru Sakamoto, Yuhsuke Takagi +2 more | 2016-11-29 |
| D678228 | Chamber block | Kazuhiro Furuki, Koichi Yamazaki | 2013-03-19 |
| D658693 | Liner for plasma processing apparatus | Jun Yamashita, Masakazu Ban, Atsushi Ueda | 2012-05-01 |
| D658691 | Liner for plasma processing apparatus | Jun Yamashita, Masakazu Ban, Atsushi Ueda | 2012-05-01 |
| D658692 | Liner for plasma processing apparatus | Daisuke Toriya, Koichi Yamazaki | 2012-05-01 |
| 7842229 | Substrate processing apparatus and substrate rotating device | Sumi Tanaka | 2010-11-30 |
| 7769279 | Heat treatment apparatus | Sumi Tanaka, Takayuki Kamaishi | 2010-08-03 |
| 7592261 | Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system | Takehiro Ueda, Katsuyuki Koizumi | 2009-09-22 |
| 7250094 | Heat treatment apparatus | Sumi Tanaka, Takayuki Kamaishi | 2007-07-31 |