Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466365 | Film-forming apparatus | Daisuke Toriya, Yuichi FURUYA | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Daisuke Toriya, Yuichi FURUYA | 2022-09-13 |
| 11396704 | Substrate holder and film forming apparatus | Takashi Mochizuki, Daisuke Toriya, Kouki Suzuki, Hwajun Noh | 2022-07-26 |
| 11280002 | Placement apparatus and processing apparatus | Kohichi Satoh, Daisuke Toriya | 2022-03-22 |
| 11104991 | Processing apparatus and cover member | Takashi Kamio | 2021-08-31 |
| 10998204 | Method of processing substrate and substrate processing apparatus | Takashi Mochizuki | 2021-05-04 |
| 10522467 | Ruthenium wiring and manufacturing method thereof | Tadahiro Ishizaka, Cheonsoo Han | 2019-12-31 |
| 10340176 | Substrate mounting method and substrate mounting device | Hiroaki Ashizawa, Taichi MONDEN, Yasushi Fujii, Yu Nunoshige | 2019-07-02 |
| 9324600 | Mounting table structure and plasma film forming apparatus | Shiro Hayashi, Hiroyuki Yokohara | 2016-04-26 |
| 9253862 | Plasma processing method and plasma processing apparatus | Tatsuo Hirasawa, Osamu Yokoyama, Chiaki Yasumuro, Ryota Yoshida, Takashi Sakuma +1 more | 2016-02-02 |
| 8592712 | Mounting table structure and plasma film forming apparatus | Ronald Nasman | 2013-11-26 |
| 8194384 | High temperature electrostatic chuck and method of using | Ronald Nasman, Rodney L. Robison | 2012-06-05 |
| 7337745 | Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor | Mitsuaki Komino, Hideaki Amano, Shosuke Endo, Yasuharu Sasaki | 2008-03-04 |