Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009217 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi | 2024-06-11 |
| 11732357 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi, Mitsuhiro Okada, Yasushi Fujii, Shinji Kawasaki, Hirotaka Kuwada +1 more | 2023-08-22 |
| 11578408 | Gas processing apparatus | Takashi Kamio | 2023-02-14 |
| 11499225 | Gas processing apparatus and gas processing method | Hirotaka Kuwada, Takashi Kamio, Yasushi Fujii | 2022-11-15 |
| 11248293 | Film-forming apparatus and film-forming method | Hirotaka Kuwada, Yasushi Fujii | 2022-02-15 |
| 10864548 | Film forming method and film forming apparatus | Hiroaki Ashizawa, Yasushi Fujii, Tsuyoshi Takahashi, Seokhyoung HONG, Kazuyoshi Yamazaki +2 more | 2020-12-15 |
| 10767262 | Gas supply apparatus and gas supply method | Shigeyuki Okura | 2020-09-08 |
| 10340176 | Substrate mounting method and substrate mounting device | Toshiaki Fujisato, Hiroaki Ashizawa, Taichi MONDEN, Yasushi Fujii | 2019-07-02 |
| 9644266 | Film forming apparatus, gas supply device and film forming method | Masayuki Nasu, Masaki Sano | 2017-05-09 |