Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732357 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi, Mitsuhiro Okada, Yasushi Fujii, Yu Nunoshige, Shinji Kawasaki +1 more | 2023-08-22 |
| 11499225 | Gas processing apparatus and gas processing method | Takashi Kamio, Yu Nunoshige, Yasushi Fujii | 2022-11-15 |
| 11248293 | Film-forming apparatus and film-forming method | Yu Nunoshige, Yasushi Fujii | 2022-02-15 |