Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392029 | Titanium nitride film forming method and titanium nitride film forming apparatus | Tsuyoshi Takahashi, Kensuke HIGUCHI | 2025-08-19 |
| 10927453 | TiN-based film and TiN-based film forming method | Tadahiro Ishizaka, Masaki Koizumi, Masaki Sano | 2021-02-23 |
| 10864548 | Film forming method and film forming apparatus | Hiroaki Ashizawa, Yasushi Fujii, Tsuyoshi Takahashi, Kazuyoshi Yamazaki, Hideo Nakamura +2 more | 2020-12-15 |
| 10529598 | Microwave heat treatment apparatus and microwave heat treatment method | Taichi MONDEN, Yoshihiro Miyagawa, Masaki Koizumi | 2020-01-07 |
| 10483100 | Method for forming TiON film | Tadahiro Ishizaka, Masaki Koizumi, Masaki Sano | 2019-11-19 |
| 10199451 | Lower electrode of DRAM capacitor and manufacturing method thereof | Tadahiro Ishizaka, Masaki Koizumi, Masaki Sano | 2019-02-05 |