Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970767 | Film forming method and film forming apparatus | Tetsu Zenko, Kazuki Ota | 2024-04-30 |
| 11535932 | Film forming method and film forming apparatus | — | 2022-12-27 |
| 10529598 | Microwave heat treatment apparatus and microwave heat treatment method | Seokhyoung HONG, Yoshihiro Miyagawa, Masaki Koizumi | 2020-01-07 |
| 10340176 | Substrate mounting method and substrate mounting device | Toshiaki Fujisato, Hiroaki Ashizawa, Yasushi Fujii, Yu Nunoshige | 2019-07-02 |
| 8852389 | Plasma processing apparatus and plasma processing method | Junichi Kitagawa, Jun Yamashita, Hideo Nakamura | 2014-10-07 |