Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870920 | Gas supply device and valve device | — | 2020-12-22 |
| 10767262 | Gas supply apparatus and gas supply method | Yu Nunoshige | 2020-09-08 |
| 10584414 | Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas | Yuki KEIMOTO | 2020-03-10 |
| 10113235 | Source gas supply unit, film forming apparatus and source gas supply method | Masayuki Hirose | 2018-10-30 |
| 9777377 | Film forming method and film forming device | Hajime Yamanaka | 2017-10-03 |
| 8382903 | Vaporizer and semiconductor processing system | Tsuneyuki Okabe, Kazuo Ujiie | 2013-02-26 |
| 8371334 | Rotary switching valve | Yukio Ozawa, Takashi Yajima, Tsuneyuki Okabe | 2013-02-12 |
| 8197600 | Vaporizer and semiconductor processing system | Ken Nakao, Hitoshi Kato, Tsuneyuki Okabe | 2012-06-12 |
| 7883076 | Semiconductor processing system and vaporizer | Tsuneyuki Okabe | 2011-02-08 |
| 7547003 | Vaporizing apparatus and semiconductor processing system | Tsuneyuki Okabe | 2009-06-16 |
| 7452424 | Vaporizer | Tsuneyuki Okabe | 2008-11-18 |
| 7343926 | Liquid raw material supply unit for vaporizer | Tsuneyuki Okabe, Hiroki Doi, Minoru Ito, Yoji Mori, Yasunori Nishimura | 2008-03-18 |