Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10584414 | Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas | Shigeyuki Okura | 2020-03-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10584414 | Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas | Shigeyuki Okura | 2020-03-10 |