Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522467 | Ruthenium wiring and manufacturing method thereof | Tadahiro Ishizaka, Toshiaki Fujisato | 2019-12-31 |
| 10190217 | Plasma film-forming method and plasma film-forming apparatus | Minoru Honda, Toshio Nakanishi, Masashi Imanaka | 2019-01-29 |
| 9406557 | Copper wiring forming method with Ru liner and Cu alloy fill | Osamu Yokoyama, Takashi Sakuma, Chiaki Yasumuro, Tatsuo Hirasawa, Tadahiro Ishizaka +1 more | 2016-08-02 |
| 9253862 | Plasma processing method and plasma processing apparatus | Tatsuo Hirasawa, Osamu Yokoyama, Chiaki Yasumuro, Toshiaki Fujisato, Ryota Yoshida +1 more | 2016-02-02 |