Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315700 | Plasma processing apparatus and ceiling wall | Satoshi Itoh, Eiki KAMATA, Taro Ikeda, Shigenori Ozaki, Soudai EMORI | 2025-05-27 |
| 10968513 | Plasma film-forming apparatus and substrate pedestal | Toshio Nakanishi, Minoru Honda, Koji Kotani | 2021-04-06 |
| 10190217 | Plasma film-forming method and plasma film-forming apparatus | Minoru Honda, Toshio Nakanishi, Cheonsoo Han | 2019-01-29 |