Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341053 | System for backside deposition of a substrate | Gerrit J. Leusink, Rodney L. Robison, Hoyoung Kang, Daniel Fulford | 2025-06-24 |
| 12103052 | Method and single wafer processing system for processing of semiconductor wafers | Shan Hu, Peter D'Elia | 2024-10-01 |
| 11920782 | Streamlined vaporizer cores | Daniel Newman | 2024-03-05 |
| 11908728 | System for backside deposition of a substrate | Gerrit J. Leusink, Rodney L. Robison, Hoyoung Kang, Daniel Fulford | 2024-02-20 |
| 11383211 | Point-of-use dynamic concentration delivery system with high flow and high uniformity | Lior Huli, Anton J. deVilliers, Rodney L. Robison, Norman A. Jacobson, Jr., James Grootegoed | 2022-07-12 |
| 11360388 | Critical dimension correction via calibrated trim dosing | Anton J. deVilliers, Jeffrey Smith | 2022-06-14 |
| 10807117 | Dispense nozzle with a dynamic liquid plug | Bruce Altemus | 2020-10-20 |
| 10712663 | High-purity dispense unit | Anton J. deVilliers, David Travis, James Grootegoed, Norman A. Jacobson, Jr. | 2020-07-14 |
| 10685857 | Dispense nozzle with a shielding device | Lior Huli | 2020-06-16 |
| 10426001 | Processing system for electromagnetic wave treatment of a substrate at microwave frequencies | Mirko Vukovic, Gerrit J. Leusink, Rodney L. Robison, Robert D. Clark | 2019-09-24 |
| 10403501 | High-purity dispense system | Anton J. deVilliers, Rodney L. Robison, David Travis, James Grootegoed, Norman A. Jacobson, Jr. +2 more | 2019-09-03 |
| 10354872 | High-precision dispense system with meniscus control | Anton J. deVilliers, Rodney L. Robison, David Travis, James Grootegoed, Norman A. Jacobson, Jr. +3 more | 2019-07-16 |
| 10256121 | Heated stage with variable thermal emissivity method and apparatus | Mirko Vukovic | 2019-04-09 |
| 10035113 | Method and system for a spiral mixer | Anton J. deVilliers | 2018-07-31 |
| 9987655 | Inline dispense capacitor system | Anton J. deVilliers, James Grootegoed, Norman A. Jacobson, Jr. | 2018-06-05 |
| 9718082 | Inline dispense capacitor | Anton J. deVilliers, James Grootegoed, Norman A. Jacobson, Jr. | 2017-08-01 |
| 9523151 | Vaporizer unit with open cell core and method of operating | — | 2016-12-20 |
| 8592712 | Mounting table structure and plasma film forming apparatus | Toshiaki Fujisato | 2013-11-26 |
| 8344300 | Device to reduce shadowing during radiative heating of a substrate | — | 2013-01-01 |
| 8291856 | Gas heating device for a vapor deposition system | Patrick Jay Biel, Jacques Faguet | 2012-10-23 |
| 8290970 | System and method for offering one or more drivers to run on the computer | Richard K. Hohmann, II, Ralph E. Rocco | 2012-10-16 |
| 8272347 | High temperature gas heating device for a vapor deposition system | Jacques Faguet | 2012-09-25 |
| 8194384 | High temperature electrostatic chuck and method of using | Rodney L. Robison, Toshiaki Fujisato | 2012-06-05 |
| 7959775 | Thermal stress-failure-resistant dielectric windows in vacuum processing systems | Mirko Vukovic | 2011-06-14 |
| 5188324 | Self-retaining mounting block | Michael L. Joseph, Steven G. Boulay | 1993-02-23 |