Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243749 | Methods to provide uniform wet etching of material within high aspect ratio features provided on a patterned substrate | Shan Hu, Henan Zhang, Sangita Kumari | 2025-03-04 |
| 12148624 | Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET) | Shan Hu, Eric Chih-Fang Liu, Henan Zhang, Sangita Kumari | 2024-11-19 |
| 12148625 | Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrate | Shan Hu, Henan Zhang, Sangita Kumari, Robert D. Clark | 2024-11-19 |
| 12100598 | Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) process | Shan Hu, Eric Chih-Fang Liu, Henan Zhang, Sangita Kumari | 2024-09-24 |
| 12100599 | Wet etch process and method to provide uniform etching of material formed within features having different critical dimension (CD) | Shan Hu, Henan Zhang, Sangita Kumari | 2024-09-24 |