Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334410 | Semiconductor device with protective film for reducing aluminum slide in aluminum wiring and manufacturing method thereof | Takashi Aoki | 2025-06-17 |
| 12289918 | Semiconductor device having integrated turn-on and turn-off resistors and diode | — | 2025-04-29 |
| 11929240 | Substrate support, substrate processing apparatus, and substrate processing method | — | 2024-03-12 |
| 11923228 | Stage and plasma processing apparatus | — | 2024-03-05 |
| 11887935 | Semiconductor device and manufacturing method thereof | — | 2024-01-30 |
| 11756808 | Plasma processing apparatus | — | 2023-09-12 |
| 11582854 | Mounting table and charge neutralization method for target object | — | 2023-02-14 |
| 11532467 | Maintenance device | Jun Hirose, Kazuyuki Tezuka | 2022-12-20 |
| 11443925 | Substrate support and plasma processing apparatus | Jun Hirose | 2022-09-13 |
| 11387334 | Semiconductor device with electrode plating deposition | — | 2022-07-12 |
| 11309168 | Vacuum processing apparatus and maintenance apparatus | Jun Hirose | 2022-04-19 |
| 11201038 | Support assembly and support assembly assembling method | — | 2021-12-14 |
| 11201039 | Mounting apparatus for object to be processed and processing apparatus | — | 2021-12-14 |
| 11175321 | Semiconductor device | — | 2021-11-16 |
| 11121010 | Plasma processing apparatus | — | 2021-09-14 |
| 11037767 | Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support | — | 2021-06-15 |
| 10968925 | Gas cylinder | Takeshi Akao | 2021-04-06 |
| 10423051 | Camera module | Hiroyuki Tahara, Kazuo Sibukawa, Atsuki Kamatani, Yoshiyuki Hotta | 2019-09-24 |
| 10396153 | Semiconductor device and method of manufacturing semiconductor device | — | 2019-08-27 |
| 10396190 | Semiconductor device and method of manufacturing semiconductor device | Yasuhiro Okamoto | 2019-08-27 |
| 10135435 | Switching device with surge recirculation device and surge recirculation line | — | 2018-11-20 |
| 9728381 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2017-08-08 |
| 9620449 | Semiconductor device having a fuse element | — | 2017-04-11 |
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2016-09-06 |
| 9177912 | Semiconductor device having a fuse element | — | 2015-11-03 |