Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9000559 | Semiconductor device, method of cutting electrical fuse, and method of determining electrical fuse state | — | 2015-04-07 |
| 8904957 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2014-12-09 |
| 8871592 | Method of manufacturing a semiconductor device including concave portion | Hiroshi Kawaguchi | 2014-10-28 |
| 8869376 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism | Yoshiyuki Kobayashi, Kaoru Oohashi | 2014-10-28 |
| 8742465 | Semiconductor device | — | 2014-06-03 |
| 8610178 | Semiconductor device having a fuse element | — | 2013-12-17 |
| 8573836 | Apparatus and method for evaluating a substrate mounting device | Yasuharu Sasaki, Taketoshi Okajo, Kaoru Oohashi | 2013-11-05 |
| 8491752 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism | Yoshiyuki Kobayashi, Kaoru Oohashi | 2013-07-23 |
| 8476701 | Semiconductor device with gate electrode including a concave portion | Hiroshi Kawaguchi | 2013-07-02 |
| 8387562 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2013-03-05 |
| 8372730 | Method for cutting an electric fuse | — | 2013-02-12 |
| 8362524 | Semiconductor device having a fuse element | — | 2013-01-29 |
| 8299569 | Semiconductor device and method of cutting electrical fuse | — | 2012-10-30 |
| 8236622 | Method for cutting electric fuse | — | 2012-08-07 |
| 8056503 | Plasma procesor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2011-11-15 |
| 7998798 | Method of cutting electrical fuse | — | 2011-08-16 |
| 7994544 | Semiconductor device having a fuse element | — | 2011-08-09 |
| 7989913 | Semiconductor device and method for cutting electric fuse | — | 2011-08-02 |
| 7835211 | Semiconductor device and method of fabricating the same | — | 2010-11-16 |
| 7795699 | Semiconductor device | — | 2010-09-14 |
| 7728407 | Semiconductor device and method of cutting electrical fuse | — | 2010-06-01 |
| 7679871 | Semiconductor device and method for determining fuse state | Norio Okada | 2010-03-16 |
| 7646581 | Electrostatic chuck | Yasuharu Sasaki, Yusuke Nakagawa, Nobuyuki Nagayama, Taketoshi Okajo, Mamoru Kosakai | 2010-01-12 |
| 7635907 | Semiconductor device with electric fuse having a flowing-out region | — | 2009-12-22 |
| 7619264 | Semiconductor device | — | 2009-11-17 |