Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532467 | Maintenance device | Takehiro Ueda, Jun Hirose | 2022-12-20 |
| 10665431 | Processing method | Kenichi Kato, Atsushi Sawachi, Takamichi Kikuchi, Takanori Mimura | 2020-05-26 |
| 9169558 | Fluid control apparatus | Jun Hirose, Yohei Uchida, Mutsunori Koyomogi, Takahiro Matsuda, Ryousuke Dohi +2 more | 2015-10-27 |
| 8394230 | Plasma processing apparatus | — | 2013-03-12 |
| 7472581 | Vacuum apparatus | Takashi Kitazawa, Atsushi Kobayashi | 2009-01-06 |
| 7299104 | Substrate processing apparatus and substrate transferring method | Hiroshi Koizumi, Tsuyoshi Moriya, Hiroyuki Nakayama | 2007-11-20 |
| D494552 | Exhaust ring for manufacturing semiconductors | Takashi Kitazawa, Norihiko Amikura, Hiroshi Koizumi | 2004-08-17 |