Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10676823 | Processing method and processing apparatus | Ryota Sakane, Hiroshi Nagahata, Hideyuki Kobayashi, Koji Yamagishi | 2020-06-09 |
| 10553408 | Supporting member and substrate processing apparatus | Akihiro Yoshimura, Yasushi Masuda | 2020-02-04 |
| 10249478 | Substrate processing apparatus | Nobutaka SASAKI, Akihiro Yoshimura | 2019-04-02 |
| 8858754 | Plasma processing apparatus | Masato Horiguchi, Hiroshi Tsujimoto | 2014-10-14 |
| 8829685 | Circuit device having funnel shaped lead and method for manufacturing the same | Tetsuya Fukushima | 2014-09-09 |
| 8692370 | Semiconductor device with copper wire ball-bonded to electrode pad including buffer layer | Yasushige Sakamoto, Motoaki Wakui | 2014-04-08 |
| 8687343 | Substrate mounting table of substrate processing apparatus | Tetsuji Sato, Akihiro Yoshimura | 2014-04-01 |
| 8609467 | Lead frame and method for manufacturing circuit device using the same | Tetsuya Fukushima | 2013-12-17 |
| 8426318 | Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode | Jun Oyabu | 2013-04-23 |
| 7589488 | Motor control apparatus | Kazuhide Takao, Yasuyuki Takei | 2009-09-15 |
| 7472581 | Vacuum apparatus | Atsushi Kobayashi, Kazuyuki Tezuka | 2009-01-06 |
| 7353841 | Relative pressure control system and relative flow control system | Tetsujiro Kono, Hiroki Doi, Minoru Ito, Hideki Nagaoka, Keiki Ito +5 more | 2008-04-08 |
| 7332803 | Circuit device | Makoto Tsubonoya, Katsuhiko Shibusawa | 2008-02-19 |
| 7201851 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Toshiki Hosaka, Atsuo Sanda, Yoshitaka Sato | 2007-04-10 |
| 7023153 | Motor control device | — | 2006-04-04 |
| 6990747 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Toshiki Hosaka, Atsuo Sanda, Yoshitaka Sato | 2006-01-31 |
| 6896764 | Vacuum processing apparatus and control method thereof | — | 2005-05-24 |
| D494552 | Exhaust ring for manufacturing semiconductors | Kazuyuki Tezuka, Norihiko Amikura, Hiroshi Koizumi | 2004-08-17 |
| 6252369 | Motor speed controller and gain setting method of the controller | Yasuhiko Kaku, Tadashi Okubo | 2001-06-26 |