Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10086581 | Carbon fiber composite material | — | 2018-10-02 |
| 9643380 | Carbon fibre reinforced composite material and production method thereof | — | 2017-05-09 |
| 9524847 | Substrate processing apparatus | Nobuhiro Wada, Makoto Kobayashi, Hiroshi Tsujimoto, Jun Tamura, Mamoru NAOI | 2016-12-20 |
| 8592319 | Substrate processing method and substrate processing apparatus | Nobuhiro Wada, Makoto Kobayashi, Hiroshi Tsujimoto, Jun Tamura, Mamoru NAOI | 2013-11-26 |
| 8426318 | Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode | Takashi Kitazawa | 2013-04-23 |
| 6673196 | Plasma processing apparatus | — | 2004-01-06 |
| 6508199 | Plasma processing apparatus | — | 2003-01-21 |