Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7201851 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Toshiki Hosaka, Takashi Kitazawa, Yoshitaka Sato | 2007-04-10 |
| 6990747 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Toshiki Hosaka, Takashi Kitazawa, Yoshitaka Sato | 2006-01-31 |
| 5837093 | Apparatus for performing plain etching treatment | Makoto Hasegawa | 1998-11-17 |
| 5795399 | Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product | Makoto Hasegawa, Haruhiko Nomura | 1998-08-18 |
| 5415728 | Method of performing plain etching treatment and apparatus therefor | Makoto Hasegawa | 1995-05-16 |