Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7201851 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Takashi Kitazawa, Atsuo Sanda, Yoshitaka Sato | 2007-04-10 |
| 6990747 | Vacuum processing apparatus and substrate transfer method | Toshihiko Kitoku, Shinji Niwa, Takashi Kitazawa, Atsuo Sanda, Yoshitaka Sato | 2006-01-31 |