Issued Patents All Time
Showing 1–25 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768123 | Diaphragm type pressure sensor arrangement having corrosion resistance and yield strength | Atsushi Hidaka, Takatoshi NAKATANI, Nobukazu Ikeda, Kouji Nishino | 2023-09-26 |
| 11421800 | Flow rate regulating valve and fluid control apparatus using the same | Keigo Kobayashi, Masakazu Nagao, Tadayuki Yakushijin | 2022-08-23 |
| 11391608 | Self-diagnosis method for flow rate control device | Katsuyuki Sugita, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2022-07-19 |
| 11346457 | Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device | Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2022-05-31 |
| 11226257 | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller | Akihiro Harada, Kouji Nishino, Koji Kawada, Katsuyuki Sugita, Nobukazu Ikeda +4 more | 2022-01-18 |
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Masahiko TAKIMOTO, Toshihide Yoshida, Kenta KONDO, Kouji Nishino | 2021-11-30 |
| 11149871 | Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used | Taiji Chiba, Kazunari Watanabe | 2021-10-19 |
| 11079774 | Flow rate control device | Katsuyuki Sugita, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2021-08-03 |
| 11054052 | Piezoelectric-element-driven valve and flow rate control device | Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2021-07-06 |
| 10711902 | Flow dividing valve | Tsuyoshi Tanikawa, Keisuke Ishibashi, Tadayuki Yakushijin, Michio Yamaji, Yoshinori Shimomura +1 more | 2020-07-14 |
| D879248 | Fluid control valve unit | Kohei Shigyou, Takashi Hirose, Kouji Nishino, Naofumi Yasumoto | 2020-03-24 |
| 10573801 | Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device | Kohei Shigyou, Takashi Hirose, Kouji Nishino, Naofumi Yasumoto | 2020-02-25 |
| 10534376 | Gas divided flow supplying apparatus for semiconductor manufacturing equipment | Kouji Nishino, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda | 2020-01-14 |
| 10386861 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2019-08-20 |
| 10386863 | Pressure-type flow controller | Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Katsuyuki Sugita | 2019-08-20 |
| 10385998 | Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus | Kohei Shigyou, Takashi Hirose, Kouji Nishino, Naofumi Yasumoto | 2019-08-20 |
| 10372145 | Pressure-type flow rate control device | Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda +2 more | 2019-08-06 |
| 10309561 | Flow passage sealing structure | Naofumi Yasumoto, Kouji Nishino, Nobukazu Ikeda | 2019-06-04 |
| 10261522 | Pressure-type flow rate control device | Masaaki Nagase, Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda | 2019-04-16 |
| 10174858 | Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve | Kaoru Hirata, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2019-01-08 |
| 10156295 | Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device | Naofumi Yasumoto, Kouji Nishino, Nobukazu Ikeda, Kohei Shigyou | 2018-12-18 |
| 10073469 | Flow meter and flow control device provided therewith | Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Atsushi Hidaka, Katsuyuki Sugita | 2018-09-11 |
| 10030789 | Diaphragm valve | Tsutomu Shinohara, Michio Yamaji, Kouji Nishino, Nobukazu Ikeda, Toshio Doh | 2018-07-24 |
| 10012334 | Structure for attaching pressure detector | Kouji Nishino, Nobukazu Ikeda, Masaki Fukasawa, Katsumi Ishiguro | 2018-07-03 |
| D820395 | Joint member for a fluid controller | Kohei Shigyou, Takashi Hirose, Kouji Nishino, Naofumi Yasumoto | 2018-06-12 |