Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209679 | Fluid control device, fluid supply system, and fluid supply method | Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino | 2025-01-28 |
| 12105019 | Density measurement device | Masaaki Nagase, Kazuteru Tanaka, Kouji Nishino, Nobukazu Ikeda | 2024-10-01 |
| 11873916 | Fluid control device, fluid supply system, and fluid supply method | Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino | 2024-01-16 |
| 11796458 | Concentration measurement device | Masaaki Nagase, Kazuteru Tanaka, Kouji Nishino, Nobukazu Ikeda | 2023-10-24 |
| 11692931 | Concentration measurement device | Masaaki Nagase, Kazuteru Tanaka, Kouji Nishino, Nobukazu Ikeda | 2023-07-04 |
| 11598430 | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device | Daihi TSUCHIGUCHI, Toshihide Yoshida, Ryutaro Tanno, Yuya Suzuki, Kenta KONDO +2 more | 2023-03-07 |
| 11519769 | Flow rate control system and flow rate measurement method | Masaaki Nagase, Satoru Yamashita, Masayoshi Kawashima, Kouji Nishino, Nobukazu Ikeda | 2022-12-06 |
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara | 2022-11-29 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata +1 more | 2022-11-22 |
| 11416011 | Pressure-type flow control device and flow control method | Katsuyuki Sugita, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Takahiro Imai +1 more | 2022-08-16 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura +1 more | 2022-02-08 |
| 11215374 | Fluid sealing device and pressure detector calibration device | Masaaki Nagase | 2022-01-04 |
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Toshihide Yoshida, Kenta KONDO, Ryousuke Dohi, Kouji Nishino | 2021-11-30 |
| 11137779 | Fluid control device, method for controlling fluid control device, and fluid control system | Kaoru Hirata, Katsuyuki Sugita, Yohei Sawada, Kouji Nishino | 2021-10-05 |
| 10884436 | Flow rate signal correction method and flow rate control device employing same | Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Masayoshi Kawashima +1 more | 2021-01-05 |
| 10883866 | Pressure-based flow rate control device and malfunction detection method therefor | Katsuyuki Sugita, Kouji Nishino, Kaoru Hirata, Nobukazu Ikeda | 2021-01-05 |