Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927280 | Diaphragm valve and monitoring method thereof with improved leak detection | Yuya Suzuki, Ryutaro Tanno, Nobuo Nakamura, Tsutomu Shinohara | 2024-03-12 |
| 11598430 | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device | Toshihide Yoshida, Ryutaro Tanno, Yuya Suzuki, Kenta KONDO, Tomohiro Nakata +2 more | 2023-03-07 |