Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402124 | Fluid heater, fluid control apparatus, and production method for fluid heater | Tsuneyuki Okabe, Toshiyuki Inada, Tatsuhiko SATO, Michio Yamaji, Tadayuki Yakushijin | 2022-08-02 |
| 11149871 | Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used | Ryousuke Dohi, Kazunari Watanabe | 2021-10-19 |
| 10309549 | Valve device, fluid control apparatus, and semiconductor manufacturing apparatus | Izuru Shikata | 2019-06-04 |
| D820391 | Valve | Izuru Shikata, Tomohiro Hashizume | 2018-06-12 |
| D762284 | Valve | Izuru Shikata, Tomohiro Hashizume | 2016-07-26 |
| 9252038 | Drive device and conveyance device | Hirotoshi Nakao, Muneyoshi Nishitsuji, Takahiro Yoshino, Takuya KURIYAMA, Daisuke Kawakubo +1 more | 2016-02-02 |