Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994938 | Vacuum processing device | — | 2021-05-04 |
| 10612130 | Vacuum processing apparatus | Hirofumi Minami, Takayuki Suzuki, Kazuhiro Musha, Seiichi Satou | 2020-04-07 |
| 9252038 | Drive device and conveyance device | Muneyoshi Nishitsuji, Takahiro Yoshino, Takuya KURIYAMA, Taiji Chiba, Daisuke Kawakubo +1 more | 2016-02-02 |
| 7955043 | Substrate transfer apparatus | — | 2011-06-07 |
| 5974797 | Hydraulic actuator package | — | 1999-11-02 |
| 4928730 | Proportional electromagnetic valve having amplifier therein | Tsuyoshi Ando, Nakayasu Hirono, Akio Mito, Kazuyuki Kihara, Kosuke Hatakenaka +1 more | 1990-05-29 |