| 11628565 |
Substrate transport device and substrate transporting method |
Hirofumi Minami, Takayuki Suzuki |
2023-04-18 |
| 11559889 |
Substrate transport device and substrate transporting method |
Hirofumi Minami, Takayuki Suzuki |
2023-01-24 |
| 10612130 |
Vacuum processing apparatus |
Hirofumi Minami, Takayuki Suzuki, Hirotoshi Nakao, Seiichi Satou |
2020-04-07 |
| 8840116 |
Seal mechanism and treatment apparatus |
Hirofumi Minami, Kiyotaka Yamada |
2014-09-23 |
| 8717737 |
Substrate conveyance method and substrate conveyance system |
Hirofumi Minami |
2014-05-06 |
| 8382421 |
Transport apparatus |
Hirofumi Minami, Kenji Ago, Takashi Asaishi, Toshio Koike |
2013-02-26 |
| 8366375 |
Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus |
Hirofumi Minami, Takafumi Kawaguchi |
2013-02-05 |
| 8167417 |
Discharge unit and discharge apparatus |
Takahiro Miyata, Masao Murata, Satoshi Shiba, Hirofumi Minami, Seiichi Satou +2 more |
2012-05-01 |