Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628565 | Substrate transport device and substrate transporting method | Kazuhiro Musha, Takayuki Suzuki | 2023-04-18 |
| 11559889 | Substrate transport device and substrate transporting method | Kazuhiro Musha, Takayuki Suzuki | 2023-01-24 |
| 10612130 | Vacuum processing apparatus | Takayuki Suzuki, Kazuhiro Musha, Hirotoshi Nakao, Seiichi Satou | 2020-04-07 |
| 9193067 | Rotation-transmitting mechanism, conveying apparatus, and driving apparatus | Kazuhiro Fujimura | 2015-11-24 |
| 8840116 | Seal mechanism and treatment apparatus | Kazuhiro Musha, Kiyotaka Yamada | 2014-09-23 |
| 8717737 | Substrate conveyance method and substrate conveyance system | Kazuhiro Musha | 2014-05-06 |
| 8505991 | Conveying device and vacuum apparatus | — | 2013-08-13 |
| 8408503 | Stage apparatus | Yasuzo Tanaka, Junpei Yuyama, Mitsuru Yahagi, Makoto Takahashi, Shinya Ito | 2013-04-02 |
| 8382421 | Transport apparatus | Kazuhiro Musha, Kenji Ago, Takashi Asaishi, Toshio Koike | 2013-02-26 |
| 8366375 | Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus | Kazuhiro Musha, Takafumi Kawaguchi | 2013-02-05 |
| 8286318 | Stage apparatus assembling method | Yasuzo Tanaka, Junpei Yuyama, Mitsuru Yahagi, Makoto Takahashi, Shinya Ito | 2012-10-16 |
| 8167417 | Discharge unit and discharge apparatus | Takahiro Miyata, Masao Murata, Satoshi Shiba, Seiichi Satou, Kazuhiro Musha +2 more | 2012-05-01 |
| 8100524 | Stage apparatus | Yasuzo Tanaka, Junpei Yuyama, Mitsuru Yahagi, Makoto Takahashi, Shinya Ito | 2012-01-24 |
| 7645112 | Transport apparatus, control method for the same, and vacuum processing system | Kenji Ago, Takafumi Kawaguchi, Toshio Koike, Junpei Yuyama | 2010-01-12 |
| 7591625 | Carrying mechanism, a carrying device and a vacuum processing apparatus | Kazuhiro Fujimura | 2009-09-22 |
| 7572093 | Transport apparatus, control method for the same, and vacuum processing system | Kenji Ago, Takafumi Kawaguchi, Toshio Koike, Junpei Yuyama | 2009-08-11 |
| 6840732 | Transport apparatus and vacuum processing system using the same | Junpei Yuyama | 2005-01-11 |
| 5184072 | Apparatus for measuring weak static magnetic field using superconduction strips and a SQUID magnetometer | Junpei Yuyama, Qiquan Geng, Kazunori Chihara, Eiichi Goto | 1993-02-02 |
| 5053707 | Apparatus for positioning a pick-up coil for detecting magnetic flux quantum trapped in a superconductor | Junpei Yuyama, Humio Naruse, Eiichi Goto | 1991-10-01 |