Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10612130 | Vacuum processing apparatus | Hirofumi Minami, Takayuki Suzuki, Kazuhiro Musha, Hirotoshi Nakao | 2020-04-07 |
| 8167417 | Discharge unit and discharge apparatus | Takahiro Miyata, Masao Murata, Satoshi Shiba, Hirofumi Minami, Kazuhiro Musha +2 more | 2012-05-01 |
| 8049454 | Rough and fine movement device, and liquid supply device incorporating the same | — | 2011-11-01 |