Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424424 | Plasma monitoring system, plasma monitoring method, and monitoring device | Jun Hirose, Kazuya Nagaseki, Shinji Himori | 2025-09-23 |
| 12142501 | Substrate processing system and temperature control method | Kenichiro Yamada, Kenichiro Nakamura, Takari YAMAMOTO | 2024-11-12 |
| 11373884 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Katsuyuki Koizumi, Tsutomu Nagai, Daisuke Hayashi | 2022-06-28 |
| 10699883 | Plasma processing apparatus, method of operating plasma processing apparatus, and power supply device | — | 2020-06-30 |
| 10679869 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Katsuyuki Koizumi, Tsutomu Nagai, Daisuke Hayashi | 2020-06-09 |